MFF Training Schedule

Training Schedule

The two admin category classes must be completed prior to taking other classes. All other trainings require user access to the Microfabrication Facility (for example, orientation exam) must be completed.
In the event of down equipment, training is rescheduled within 1 week of the equipment returning to operational status.
Users must register for classes two (2) days prior to the scheduled class; otherwise trainings may be canceled. Use the registration links beneath the schedule below.
Effective training stems from applied learning and is best done using test samples mimicking your desired fabrication operation. Please coordinate samples and peripherals with your trainer in advance.

Class/Register	Category	Staff	Duration
Lab Orientation	Admin	Darick Baker	1.5 hrs
Wet Chemistry	Admin	Andrew Lingley	1 hr
Leica Microscope	Lithography	Mike Khbeis	30 min
EVG Aligner for Mask Alignment	Lithography	Mike Khbeis	1 hr
Negative Lithography (Headway Spinner & 3" Quintel)	Lithography	Mike Khbeis	30 min
Positive Lithography (ABM Aligner & CEE Spinners)	Lithography	Mike Khbeis	1 hr
Oxidation Furnace	Dielectric Deposition	Paul Schilling	45 min
PECVD	Dielectric Deposition	Paul Schilling	45 min
Oxford Sputter	Metal Deposition	Rick Bojko	45 min
Lesker Sputter	Metal Deposition	Mike Khbeis	60 min
E‐beam Evaporators: EVAP1, EVAP2, EVAP3	Metal Deposition	Darick Baker	3 hrs
Wafer Bonding using EVG Systems	Bonding	Mike Khbeis	1.5 hrs
Barrel Etcher	Etching	Paul Schilling	30 min
Deep Reactive Ion Etcher (30 min)	Etching	Paul Schilling	30 min
Trion RIE	Etching	Paul Schilling	30 min
Tegal Oxide Etcher	Etching	Paul Schilling	45 min
Vision RIE	Etching	Paul Schilling	30 min
ICP - Chlorine	Etching	Rick Bojko	45 min
ICP - Fluorine	Etching	Rick Bojko	45 min
Scanning Electron Microscopy	Metrology	Rick Bojko	1 hr
Optical Profiler	Metrology	Paul Schilling	45 min
Dicing Saw	Back-End	Mike Khbeis	30 min
Alpha-Step Profilometer	Metrology	Paul Schilling	30 min
P-15 Profilometer	Metrology	Paul Schilling	30 min

If you experience any difficulty signing up for training, please contact Michael Khbeis at khbeis@uw.edu.

Karl F. Böhringer
MFF Director
206-221-5177
karlb@uw.edu