The Microfabrication Facility is a remarkable resource for industrial and academic researchers. Located on the Seattle UW campus, the lab serves as a critical facility for research, technology development and prototyping. The 15,000-square-foot lab represents more than $20 million in facilities and equipment, and is the largest public-access microfabrication facility in the Pacific Northwest.

We are proud to announce a new alignment of resources, transitioning from the Washington Technology Center/Microfabrication Laboratory to the University of Washington and the College of Engineering. Read more about the transition »

The Microfabrication Facility offers advanced microfabrication and characterization capabilities in 8,000 square feet of class 10,000 cleanroom space. The lab supports the processing of micro-electromechanical systems (MEMS), microfluidic, micro-optic, photonic and sensor devices with feature sizes down to one micron on 3" and 4" diameter substrates.

For details on the technology and processes we offer, see MFF Services and MFF Toolbench.

Client Products

Here are just a few of the new products developed by companies based on the parts they made in the Microfabrication Facility:

Many of our clients perform confidential work here at the lab, and their needs for maintaining privacy around their designs and processes are respected.

Additional Resources

• National ESCA and Surface Analysis Center for Biomedical Problems
  Expert and detailed information about surface properties (composition, structure, spatial distribution, and molecular orientation) for biomedical researchers. NESAC/BIO addresses biomedical research and development issues through state-of-the-art instrumentation, specialized experimental protocols, and data analysis methods.
• The Center for Nanotechnology at the University of Washington
  User facility equipped with atomic force microscopes, field emission electron microscope with energy-dispersed spectrometer (EDAX), inverted fluorescence optical microscope, and an electron-beam writing system for nanolithography.

The Microfabrication Facility operates jointly with the NanoTech User Facility at the University of Washington.

A member of the National Nanotechnology Infrastructure Network.