| Overview: |
MEMS (Micro Electro Mechanical Systems) is a rapidly growing field
which builds on the existing silicon processing infrastructure to
create micron-scale machines. Unlike conventional integrated circuits,
these devices can have many functions, including sensing, communication,
and actuation. Just like microelectronics, MEMS technology will
permeate our everyday lives in the coming decades.
The course will be completely web-based for EDGE students, including
streaming video of lectures, on-line discussion, and downloading/uploading
of homework assignments.
|
| Dates: |
Autumn Quarter (September 29 - December
18, 2003) |
| Prerequisites: |
This class covers a broad set of topics
in multiple engineering disciplines but does not have specific course
requirements. |
| Course Objectives: |
Students will obtain a comprehensive overview
of the field of micro electro mechanical systems (MEMS). This course
emphasizes the conceptual understanding of the design, fabrication,
and operation of MEMS devices. The underlying principles of micromachined
transducers are illustrated on specific examples. Upon completion,
students will be able to design and analyze their own MEMS devices.
This course is the basis for advanced courses and graduate research
in MEMS. |
| Course Description: |
This class is an introduction to this exciting new field. The course
will cover a wide range of topics including:
- bulk and surface micromachining
- mechanical and electrical design
- MEMS design and layout
- fabrication processes and MEMS foundries
- applications, for example:
- microactuator arrays for "smart surfaces"
- micro-opto-electromechanical systems (MOEMS)
|
| Instructor: |
Karl Böhringer is an assistant professor
in the UW Department of Electrical Engineering. He received both his
Ph.D. and M.S. degrees in Computer Science from Cornell University
and his Diplom-Informatiker degree from the University of Karlsruhe,
Germany. He has worked on distributed micro actuator arrays, MEMS
distributed cilia arrays, and techniques for parallel micro selfassembly
during stints at the Cornell Microfabrication Facility, the Stanford
Robotics Lab and Transducer Lab, and the University of California,
Berkeley. His current interests as a member of the UW Center of Applied
Microtechnology include system-level and distributed MEMS, microassembly,
and microfluidic and biomedical microdevices. He received an NSF Postdoctoral
Associateship in 1997 and an NSF CAREER award in 1999. |
| Textbook: |
G.T.A. Kovacs, Micromachined
Transducers Sourcebook, McGrawHill 1998, available from the
UW Bookstore. |
| Lectures: |
Approximately 20 lectures of 2 hours each.
Available live and on-demand via Internet streaming media. Check-out
of CD-ROMs or videotapes is also available upon request in advance. |
| Homework and Examinations: |
Four assignments due throughout the quarter
involving the design, analysis, layout, and simulation of MEMS devices.
One mid-term exam, to be proctored at the student's work site. |
| Project: |
Small team-based research project summarized
in a four-page write-up (conference abstract style). |
| Laboratory: |
On-campus students and EDGE students who
are able to travel to campus will have an opportunity to actively
participate in the fabrication of MEMS devices at the UWEE Microfabrication
Laboratory or at the Washington Technology Center, facilities on campus
that house clean rooms available to university and industry. Special
evening or weekend hours will be scheduled. Students who are not able
to travel to campus will receive a microfabricated chip. The exercise
is not graded. |
| Computer Requirements: |
Video Requirements: PC (Windows, Solaris or Macintosh) with
Internet connectivity at 56 Kbps or higher (250 Kbps strongly recommended
for streaming video); sound card; Microsoft Windows Media Player.
A UW student computing account (including email) will be provided.
|
| Credits: |
4 - Auditing permitted. |
| Cost: |
$520 per credit = $2,080. Members of IEEE
receive a 10% discount. |
| Application: |
To use these credits toward a graduate
degree in the future, first apply for Graduate Non-Matriculated Status
by September 1. See www.engr.washington.edu/edge/application.html
for details. Otherwise, enroll as a Non-Matriculated student. |
| Registration: |
Fill out the
registration form. Registration deadline is September 19, 2003.
|
| For more information: |
UW/EDGE Program
University of Washington
10303 Meridian Avenue North, Suite 301
Seattle, WA 98133
206.685.2242
206.543.2352 (Fax)
edge@engr.washington.edu
www.engr.washington.edu/edge |
EDGE Contacts
UW
